株式会社インターテック エンジニアリング

株式会社インターテック エンジニアリング

MENU
イメージ画像

SERVICE-00PARTS取り扱い部品

  • ウォームギアの画像
    BD0-5194-100

    ウォームギア

  • ホイルギアの画像
    BD0-5195-100

    ホイルギア

  • エリプソミラー（再コート）の画像
    BN9-5015-R00

    エリプソミラー（再コート）

  • G3ミラーの画像
    BN9-5022-100

    G3ミラー

  • G2ミラーの画像
    BN9-8079-100

    G2ミラー

  • ASエアシリンダーの画像
    BS6-0363-100

    ASエアシリンダー

  • ワイヤー（＋）の画像
    Y60-0211-100

    ワイヤー（＋）

  • ワイヤー（−）の画像
    Y60-0212-100

    ワイヤー（−）

MPA部品一覧

059-MPA
Spacer
060-MPA
Regulator base (12V4.5A)
061-MPA
Regulator base (12V8A 5V20A)
062-MPA
Regulator base (24V)
179-2974-ND
AC/DC CONVERTER
2004082-001
SIDE,SHIELD RV-FF,1500
22-00234-00
O-RING
253R0014-01
STOP POSITIONER
381-1110-ND
FAN
63-6131-100
COIL SPRING (small spring)
63-6354-100
Slip washer
995732-006
Chemical Gas Tube
995753-001
Spring
BA0-1191-100
CYLINDER
BA0-1747-100
piston
BA0-1748-100
cylinder
BD0-0410-100
Shutter plate
BD0-0711-100
Lock plate
BD0-0753-100
Gear
BD0-0828-100
STAGE LOCK DISC
BD0-0829-100
DISK
BD0-0830-100
SPRING
BD0-0845-R10
CLUCH DISC (Medium)
BD0-0846-R10
CLUCH DISC(A) Top
BD0-0847-R10
CLUCH DISC(B) Lower
BD0-0879-100
RACK
BD0-0884-100
CALIBRATION PIN
BD0-0925-100
SUCTION RUBBER
BD0-0960-100
RUBBER WASHER
BD0-1559-100
Spherical seat
BD0-1561-100
disk
BD0-1567-100
RING SPRING
BD0-1568-100
disk
BD0-1573-100
Pulse motor gear
BD0-1574-100
shaft
BD0-1578-100
Gear
BD0-1582-100
Delrin Gear (L)
BD0-1583-100
Delrin Gear (S)
BD0-1586-100
COIL SPRING
BD0-1588-100
Vacuum Gear
BD0-1591-100
Guide Bar
BD0-1604-100
HOLDER
BD0-1605-100
Shield Rubber
BD0-1849-100
Eccentric rod (lot of 10) complete set
BD0-1909-100
shaft
BD0-1919-100
Guide pin
BD0-1989-100
Adhesive Rubber
BD0-2045-100
Lock lever
BD0-2762-100
VACC nipple φ2.0×M3
BD0-2763-100
Sensor nipple φ3.5 x M4
BD0-3042-100
O-RING
BD0-3064-100
PIN
BD0-3200-100
SHAFT(A)
BD0-3371-100
NIPPLE
BD0-3375-100
SLIP WASHER
BD0-3376-100
Stopper holder (A)
BD0-3377-100
Stopper holder (B)
BD0-3378-100
Stopper holder (B)
BD0-3385-800
SHIELD RUBBER
BD0-3426-100
RUBBER
BD0-3435-100
HOLDER PLATE
BD0-3436-800
PLATE
BD0-3437-100
4 inch spring plate
BD0-3438-100
SHIELD RUBBER
BD0-3525-100
STOPPER PIN
BD0-3525-800
STOPPER PIN
BD0-3634-100
JOINT
BD0-3716-100
ROD
BD0-3717-100
CAP
BD0-3734-100
KNOB
BD0-3737-100
BUSHING
BD0-4099-100
shaft
BD0-4210-100
PIN (500)
BD0-4459-100
cam
BD0-4462-100
COIL SPRING
BD0-4470-100
roller
BD0-4496-100
4" SETTING ROLLER
BD0-4505-100
ROLLER
BD0-5172-100
GEAR
BD0-5194-100
WORM GEAR (number MP990607-1K)
BD0-5195-100
WORM WHEEL (number MP11604-1K)
BD0-5198-100
BEARING (6000)
BD0-5202-100
BEARING (6300)
BD0-5216-100
Super endless belt SE-G30-SBU
BD0-5239-100
Casting angle
BD0-5250-100
Cylinder (SS)
BD0-5290-800
5" shieldrubber outer
BD0-5432-100
shielding plate (SUS)
BD0-5595-100
Leaf spring
BD0-5602-100
Mask pin
BD0-5788-100
Bearing DDL-1260ZZ
BD0-5845-100
Pneumacushion
BD0-5870-100
REGULATOR (2302-2C)
BD0-5891-100
Regulator
BD0-8260-100
RUBBER
BD0-8262-800
SHIELD RUBBER
BD0-8263-100
SHIELD RUBBER
BD0-8264-100
SHIELD RUBBER
BD0-8425-100
SUCTION RUBBER UNIT
BD0-8429-100
BOLT (SUS)
BD0-8440-100
Mounting bracket B
BD0-8441-100
Mounting bracket C
BD0-9431-100
Juracon Catch
BD0-9434-100
STOPPER PIN (COVER)
BD0-9448-100
SUCTION RUBBER UNIT
BD0-9551-100
SUCTION RUBBER
BD1-2349-100
CLAMP
BD1-2352-100
rod
BD1-2408-100
PULL
BD1-2855-100
Nuts (SUS)
BD1-2946-100
Rubber roller
BD1-2959-100
Roller
BD1-2995-100
Auto Hand
BD1-3196-100
Shading plate (SUS)
BD1-3202-100
Shading plate (SUS)
BD1-3226-100
Sensor plate
BD1-3228-100
Elevator spacer (A)
BD1-3229-100
Elevator spacer (B)
BD1-3237-100
Gear
BD1-3244-100
Gear
BD1-3272-100
O-ring
BD1-3292-100
WIRE
BD1-3345-100
bearing
BD1-3371-100
PLA600 Mask plate nipple
BD1-3636-100
Chuck Cover
BD1-3640-100
Suction rubber holder 6"
BD1-3641-100
SUCTION RUBBER
BD1-3642-100
Disc Handle
BD1-3655-100
SUCTION RUBBER HOLDER(4",5")
BD1-3656-100
SUCTION RUBBER
BD1-3734-100
Auto Hinge
BD1-3786-100
Auto Feeder Positioning Arm
BD1-3787-100
Wafer Position Arm
BD1-3889-100
ARM SHAFT
BD1-3897-100
ARM
BD1-3912-100
T/T sensor - shielding plate
BD1-3914-100
PIN (600)
BD1-4065-100
Holder, Roller
BD1-4092-100
O-ring
BD1-4093-100
BELT
BD1-4700-100
cam
BD1-5157-100
Slit bar (M600)
BD1-5164-100
BLADE SET BLOCK
BD1-5167-100
SCREW FOR BLADE
BD1-5370-100
HOUSING
BD1-5535-100
SUCTION RUBBER
BD1-5537-100
Delrin Gear L
BD1-5538-100
Delrin Gear S
BD1-5539-100
Slip washer
BD1-5595-100
(+) SPRING
BD1-5597-100
O-ring
BD1-5600-100
HOLDER PLATE
BD1-5601-100
HOLDER PLATE
BD1-5602-100
SPRING PLATE
BD1-5603-100
SHIELD RUBBER
BD1-5604-100
SHIELD RUBBER
BD1-5604-800
SHIELD RUBBER
BD1-5606-100
PLA600 Ball gauge for mask plate
BD1-5607-100
PLA600 Mask plate elbow
BD1-5608-100
PLA600 Mask plate elbow
BD1-5609-100
PLA600 Mask plate nipple
BD1-5681-100
6 inch rubber roller
BD1-5695-100
RUBBER RING
BD1-5700-100
cam
BD1-5735-100
block
BD1-5744-100
Screw Trapezoidal Thread
BD1-5745-100
Resin receiver
BD1-5787-100
bearing
BD1-5788-100
bearing
BD1-5790-100
belt
BD1-5794-100
belt
BD1-5840-100
Pencil cylinder SCPD3-00-16-45
BD1-5841-100
belt
BD1-5842-100
belt
BD1-5843-100
belt
BD1-5844-100
belt
BD1-5845-100
belt
BD1-5846-100
belt
BD1-5980-100
Shutter plate
BD1-6016-100
Lamp fixing stand
BD1-6142-100
Positioning frame
BD1-6681-100
block
BD1-7315-100
ARM
BD1-8364-100
Pulse motor gear
BD1-9448-100
Adhesive Rubber
BD1-9551-100
SUCTION RUBBER UNIT
BD4-0123-100
Chamber Support
BD6-0076-100
block
BD6-0081-100
Slit Bar
BD6-1414-100R
Middle plate (recycled product)
BD6-2844-100
BAR
BD6-4709-100
AS Cover
BD7-9407-100
Gear
BD8-0635-100
plate
BF6-0009-100
Rotary Solenoid
BF6-0023-100
DC Motor
BF6-0050-100
IDLE GEAR HOLDER
BF6-0082-100
FEED SCREW UNIT
BF6-0110-100
Idler (left)
BF6-0111-100
Idler (right)
BF6-0161-100
MOTOR (θ)
BF6-0170-100
MOTOR (Y micro)
BF6-0172-100
MOTOR (XY coarse)
BF6-0190-100
LAMP UNIT
BF6-0286-100
Knob unit (L)
BF6-0287-100
Knob unit(R)
BF6-0289-100
Screw Unit
BF6-0494-100
Lamp unit
BF6-0526-100
Wafer stage retainer (large)
BF6-0527-100
Wafer stage retainer (small)
BF6-0528-100
MOTOR (X)
BF6-0529-100
MOTOR (Y)
BF6-0530-100
MOTOR (θ)
BF6-0557-100
Lead screw
BF6-0562-100
JOINT BAR
BF6-0684-100
FEED SCREW UNIT(R)
BF6-0685-100
FEED SCREW UNIT (L)
BF6-0694-100
SUCTION RUBBER (L)
BF6-0694-110
SUCTION RUBBER (L) B grade
BF6-0695-100
SUCTION RUBBER(R)
BF6-0695-110
SUCTION RUBBER(R) Grade B
BF6-0735-100
Rotary Actuator
BF6-6857-100
Pulse motor
BF6-6860-100
MOTOR (W/S φ)
BG0-7358-100
First flyeye lens
BG4-5993-100
ISOLATION MV/DVR PCB assembly
BG4-8913-100
Communication cable for exposure equipment
BG6-0070-100
PCB70
BG6-0071-100
PCB71
BG6-0072-100
MAGNETIC VALVE
BG6-0124-100
PCB-7
BG6-0125-100
PCB-8
BG6-0127-100
PCB10
BG6-0128-100
PCB11
BG9-0120-100
Mother board
BG9-0121-100
LI PCB
BG9-0354-100
ILPCB
BG9-0395-K00
PFD PCB
BG9-0534-100
LI-PCB
BG9-1419-100
AS PREAMP PCB
BG9-1494-100
PCB UNIT
BG9-1495-100
Mother board
BG9-1508-100
PCB8
BG9-1510-100
PCB10
BG9-1512-100
PCB12
BG9-1514-K00
PCB14
BG9-1621-100
PHOTO UNIT
BG9-1634-100
Vacuum Gauge
BG9-1635-100
Vacuum Gauge
BG9-1641-100
switch
BG9-1659-100
MB7122E
BG9-9372-100
PCB14
BH0-1082-100
HDSP-2000 Display IC
BH0-1153-100
Photo diode
BH0-2067-100
NJM4558D
BH0-2122-100
UPA53C
BH0-2138-100
SN74273N
BH0-2155-100
NJM4151D
BH0-4019-100
Photo transistor
BH0-4375-100
PHOTO SENSOR
BH1-1099-100
Variable Resistor
BH2-0057-100
Pulse motor
BH2-0061-100
DC MOTOR
BH2-0062-100
MOTOR
BH2-0087-100
AC Motor
BH2-0090-100
MOTOR
BH2-0092-100
DC Motor
BH2-0202-100
motor
BH2-0214-100
motor
BH2-0245-100
Sirocco fan
BH2-0310-100
Pulse motor (Type 2 for 600)
BH2-0340-100
AC Fan Motor
BH2-0341-100
AC Fan Motor
BH2-0723-100
Pulse motor (type 1)
BH2-0828-100
DC Motor
BH2-1042-100
MAGNETIC VALVE (AIR)
BH2-1043-100
MAGNETIC VALVE (VAC)
BH2-1044-100
Solenoid valve
BH2-2043-100
RELAY
BH2-2159-100
COUNTOR (H7EC-NV)
BH2-5009-100
HOUR METER
BH3-0061-K00
MOTOR
BH3-0075-100
SWITCH (fine/coarse movement) MLW3022
BH3-0076-100
Switch MLW-3028
BH3-0077-100
Thumbwheel Switch
BH3-0078-100
Thumbwheel Switch
BH3-0079-100
Thumbwheel Switch
BH3-0084-100
Rotary switch
BH3-0229-100
PUSH SWITCH
BH3-0230-100
Paddle Switch
BH3-0231-100
Paddle Switch
BH3-0239-100
Push button switch A3PA-90C12-24EV
BH3-0240-100
Push button switch A3PA-90D12-24EV
BH3-0304-100-1
Switch
BH3-0304-100-2
Bezel
BH3-0304-100-3
Lever
BH3-0786-100
Switch lamp (LED white split)
BH3-0787-LBS
switch
BH3-0787-LBS-1
switch
BH3-0787-LRS
switch
BH3-0787-LRS-1
switch
BH3-3042-100
LAZER HEAD
BH3-3049-100
MERCURY LAMP
BH3-3071-100
LAMP (DEEP UV)
BH3-3078-100
FILAMENT-LAMP 6V3A506E
BH3-3098-100
LASER HEAD 3225H-PC 5mw
BH3-3106-100
Mercury LAMP
BH3-3106-110
Mercury Lamp USH-2002MA1L
BH3-3180-100
Halogen lamp
BH3-3182-100
TUNGSTEN FILAMENT LAMP
BH3-4207-100
connector
BH3-4566-100
connector
BH3-9042-100
SW LEVER
BH3-9349-100
Bezel
BH3-9382-100
Lever
BH5-3038-100
Power supply 12V4.5A
BH5-3039-100
Power supply 5V20A
BH5-3040-100
Power supply 12V8A
BH5-3041-100
Power supply 24V6A
BH5-3110-100
Power supply 15V
BH5-3111-100
Power supply 12V
BH5-3160-100
power supply
BH5-3163-100
power supply
BH5-3273-100
DC POWER UNIT
BH5-3792-100
power supply
BH5-6011-100
HEAT SENSOR
BH5-7028-100
Air sensor APA1-AA07
BH6-4163-100
DC MOTOR
BH7-0213-100
Receptacle (square flange type)
BN9-4025-100
First mirror surface reflection
BN9-4026-100
FILTER
BN9-4027-100
FILTER
BN9-4147-100
Colourmeter Lens
BN9-4150-100
FILTER
BN9-4279-100
Surface reflection second mirror
BN9-4706-100
MIRROR (recoated) φ55
BN9-4709-100
First Mirror
BN9-4728-E01
MIRROR (recoated) φ50
BN9-4730-100
MIRRORφ40
BN9-4731-800
Mirror
BN9-5015-100
Ellipso Mirror
BN9-5017-100
Cylindrical Lens
BN9-5022-100
G3 Mirror
BN9-5024-100
G7 Mirror
BN9-5026-100
G4 Mirror
BN9-5027-100
G5 Mirror
BN9-5030-100
Cylindrical lens (5")
BN9-5032-100
First condenser lens
BN9-5033-100
First condenser lens
BN9-5043-100
Cylindrical lens 6"
BN9-5203-100
Second Condenser Lens
BN9-5204-100
Second Condenser Lens
BN9-5205-100
Third condenser lens
BN9-5206-100
G4 Mirror
BN9-5207-100
G5 Mirror
BN9-5268-100
1st mirror (for PLA600)
BN9-5269-100
Collimator lens (for PLA600)
BN9-5273-100
MIRROR
BN9-5407-100
Wind shield
BN9-8079-100
G2 Mirror
BS1-2022-100
O-RING
BS2-0058-100
BEARING (NSK688)
BS2-0064-100
BEARING (NSK 609)
BS2-0076-100
BEARING (ORIGN T3-1)
BS2-0077-100
BEARING (NB SM-6G)
BS2-0093-100
BEARING (NSK F684ZZ)
BS2-0094-100
BEARING (NSK 626ZZ)
BS2-0095-100
BEARING
BS2-0096-100
BEARING (NSK 693)
BS2-0098-100
Pyroball (SBT-6)
BS2-0100-100
BEARING
BS2-0117-100
BEARING F-W683ZZ1
BS2-0129-100
Bearing
BS2-0129-110
Bearing
BS2-0131-100
BEARING (SSLF-730ZZ)
BS2-0133-100
BEARING (MF52)
BS2-0134-100
BEARING (NMB L-730ZZ)
BS2-0136-100
BEARING (DDLF-630ZZ)
BS2-0204-100
BEARING
BS2-0211-100
BEARING (ORIGN T8-16)
BS2-0212-100
BEARING (ORIGN T12-23)
BS2-0213-100
BEARING (ORIGN T10-18)
BS2-0299-100
Cam Follower
BS2-0301-100
Bearing
BS2-1033-100
Bearing
BS6-0064-100
bearing
BS6-0141-100
V-RING
BS6-0143-100
WASHER
BS6-0160-100
Bearing (LM81517)
BS6-0162-100
PILLOW BALL (MBT-8)
BS6-0169-100
BELLOWS
BS6-0184-100
CYLINDER (A/H UP DOWN)
BS6-0185-100
Nylon ball
BS6-0207-100
Filter unit M4000-8-WF-1
BS6-0290-100
SPEED CONTROLLER (GRO-M5)
BS6-0309-100
SPEED CONTROLLER (GR-M5)
BS6-0336-100
Micrometer Head
BS6-0363-100
Air Cylinder
BS6-0637-100
Speecon (W type)
BS6-0658-100
Switch guard A3PA-5050
BS6-0662-100
TAC valve 3V
BS6-0665-100
CYLINDER (T/T LOCK)
BS6-0667-100
Shock absorber
BS6-0779-100
CYLINDER(BS7-4126-100)
BS6-0787-100
Insulator
BS7-1060-100
Clean Gas Filter
BS7-4003-100
CYLINDER
BS7-4003A-100
Pen cylinder (special item)
BS7-4004-100
CYLINDER
BS7-4005-100
CYLINDER
BS7-4007-100
CYLINDER
BS7-4009-100
CYLINDER (A/H) 600
BS7-4126-100
CYLINDER
BY9-0502-100
Arkansas Oilstone
BY9-3202-100
Special grease
BY9-3206-100
Special grease
BY9-8025-100
GAP ADJUSTING BAR
C1-001
Plug, Connector Body
C1-002
Plug and connector set
C1-003
connector
C1-004
Plug and connector set
COV-0007-100
Side Covers
COV-0010-100
cover
COV-0021-100
Acrylic cover
COV-0026-100
Lighting device stay 1
COV-0027-100
Lighting device stay 2
COV-0029-100
cover
D20180828
PLA600 Retaining plate
F4811-ND
FUSE
FS-V31P
Mega Fiber Sensor
FS-V32P
Mega Fiber Sensor
HB-50111AA-100
Lighting device 500W
INT-021-01
cover
IUC-M3
Illumination adjustment shutter
IUCM-002
LAD1-001 5VDC
M2211-1K
Elevator plate
M401-37-100
SOLENOID VALVE (Used)
MPA-002
AS Handle
MPA-003
STB Board
MPA-035
Ultra-small Micro J-7
PSC-0003-100
SWITCH COVER
SD-3042-100
W/D PIN
SD-4106-100
BALL BEARING
WA3-0148-100
Logic Gates
WA4-0057-100
I C
WC1-0025-100
switch
WC9-5008-100
switch
WG1-9001-100
Halogen lamp
WN1-0097-100
power supply
X-001
Blade Hose
X-002
Inverter
X-003
Sterilization light eVIO-100
X-004
AC adapter
X-005
Switch Option APX510-60
X-006
SWITCH GUARD
X-007
Cable ties
X-008
Outlet, set of screws
X-009
Braided Hose
X-010
O-ring P24
X-025
Mercury lamp SUV-2001CIL1
X-026
Thermocouples
X-027
Assembled terminal block
X-028
Temperature Sensor
X-029
Halogen bulbs
X-030
FPA temperature sensor mounting bracket
X-032
Relay MY2 DC24
X-033
Small spring (2 pieces)
X62-0876-100
Microswitch
X62-0879-100
Microswitch
X62-7620-100
TUNGSTEN LAMP
X65-7356-100
SN74279N
X65-7448-100
SN7414N
X71-0257-100
BEARING
X71-0258-100
BEARING
XG2-4008-103
bearing
XG3-3006-253
Bearing L-630ZZ
XG3-4007-100
bearing
XG3-4008-100
bearing
XG3-4010-100
bearing
XG3-6012-100
Bearing (MF126ZZMC3)
XG8-1100-032
SUS440C steel ball
Y60-0152-10R
BELT (Orange)
Y60-0182-100
AF SCREEN UNIT
Y60-0211-100
Wire (+)
Y60-0212-100
Wire (-)
Y60-0237-100
GEAR
Y60-0293-100
Gear Unit
Y60-0294-100
Motor unit
Y60-4002-100
6inch arm (L)
Y60-4003-100
6inch arm (R)
Y60-4027-100
ROTARY SOLENOID
Y60-4045-100
IUC-M CABLE
Y60-4168-100
Gear Head
Y60-4172-K00
Motor unit
Y60-9294-100
Lighting device fan
Z-001
Chiller set (TYU-0008)
Z-002
Bluetooth Gateway Set
Z-003
tablet
Z-004
Illumination Uniformity Checker Mask Aligner Meter (P/N:IUCM-3) TYU-009 S/N601009
2006283-001
TRANSDUCER
2006283-001S
TRANSDUCER
082649-000
GEARREDUCER
083476-000
Lamp IR quartz
088851-000S
MOTOR
09-600100
Vibration Dampeners
10-114100
Rotor Stop Positioner
10-122105
Humphrey Valve/Solenoid 24V
2004080-001
PLATE,BACK,INJECTOR
2004081-001S
PLATE,BACK,VENT
2004082-001
PLATE SIDE,SHEILD
815001-628
C-RING
815001-628S
C-RING
840-0017-01
POWER SUPPLY
900371-001
TRANSLATOR MOTOR
909189-001
RETURN SHUTTLE FLEX CABLE
909189-001S
RETURN SHUTTLE FLEX CABLE
912085-001
HEATER,QUARTZ
917657-001
HARNESS,TRACK,SHUTTLE,RETURN
917657-001S
HARNESS,TRACK,SHUTTLE,RETURN
929342-001
N2 SHIELD
929342-001S
N2 SHIELD
929345-001
N2 SHIELD
BG6-0296-600
AF-4K-Ⅱ PCB
BG6-0477-200
SCAN DRIVE PCB (USED)
BG9-0395-200
VALVE DRIVE PCB (USED)
BG9-0410-600
AF-4K-Ⅱ PCB
BG9-1221-600
AS/IL PCB
BG9-2101-600
AF3 distributor PCB
BN9-4147-L00
LENS
BY9-9590-600
Canon Chuck Maintenance Kit
M401-37-24
SOLENOID VALVE 24V DC
MPA-00005-MPA1K
DR KITRegulator Cap
008-MPA
MICRO SWITCH (very small)
010-MPA
CYLINDER SENSOR SWITCH (CS9HA)
011-MPA
micro switch
013-MPA
Vacuum pump DA-60S
018-PLA
Caster
019-PLA
Caster
020-PLA
Siroco Fan Duct Fitting (FD-8)
022-MPA
F block
025-MPA
MASK CHUCK Plumbing
030-PLA
Washer (for vibration isolation table)
031-PLA
Nut (for vibration isolation table)
034-MPA
Spacer
035-MPA
Thumb wheel switch (+/-)
036-MPA
Thumbwheel switch (decimal point)
041-MPA
Bearing CFA3A (THK)
042-PLA
Sirocco fan base parts
049-MPA
Leveling Base
050-MPA
Adjusting Screw
051-MPA
Leveling Pad
052-MPA
Mask chuck handle (for 600)
053-MPA
Blind Cover
059-MPA
Spacer
060-MPA
Regulator base (12V4.5A)
061-MPA
Regulator base (12V8A 5V20A)
062-MPA
Regulator base (24V)
063-MPA
Meter spacer
10026-100
basis
16MXL3.2BF
Synchronous pulley
195-3157
Circular Connectors
28-5107-300
Noise Filter
32MXL3.2BF
Synchronous pulley
365-1732-ND
ORIFICE SENSOR
5-AH-U
5" Auto Hand
5-DZ-N
5" pedestal
567-0845
Sensor amplifier 90-7
567-1116
ARMB INTERNAL SUPPORT
567-1487
Halogen lamp
567-1488
Halogen lamp
57-000-001
Rotary Union
6X4X300
HB protection tube
63-6354-300
Slip washer
63-6366-300
COIL SPRING
63-6366-P00
COILED SPRING
63-6763-E00
KEY
63-6765-300
Knob (Lighting System XYZ)
6LVV-DPHBW4-PC
Springless Diaphragm Valve
70MXL3.2UK
Bancoran Synchro Belt
7200-1541
Assy, IC, EL2007 with heat sink
912085-001
QUARTZ HEATER
9400-0048F
VISO HALOGEN LAMP 12V50W
9407-0040J
PMT, R636
A16ZA-5050
Switch cover (rectangular)
A16ZJ-5050
Switch cover (square)
A50026A-01
NUT
A50027A-01
RING
A50028A-01
WASHER (rubber)
AM1185-04-01
Slit Color
AP101-12-1
Digital Panel Meter
BA0-1739-E00
COIL SPRING
BA0-1739-P00
COILED SPRING
BD0-0711-300
Lock plate
BD0-0748-300
Screw (A/F)
BD0-0753-300
Gear (A)
BD0-0772-300
GUIDE RAIL
BD0-0773-300
GUIDE RAIL
BD0-0799-300
block
BD0-0830-Z00
SPRING
BD0-0832-305
STOPPER
BD0-0845-R00
CLUCH DISC (Medium)
BD0-0846-R00
CLUCH DISC(A) Top
BD0-0847-R00
CLUCH DISC(B) Lower
BD0-0925-800
SUCTION RUBBER
BD0-1033-300
bearing
BD0-1080-E00
NIPPLE
BD0-1556-J00
PLATE
BD0-1556-R00
PLATE (regrinding)
BD0-1561-300
disk
BD0-1568-300
disk
BD0-1573-300
Pulse motor gear
BD0-1582-300
Delrin Gear (L)
BD0-1583-300
Delrin Gear (S)
BD0-1588-300
Vacuum Gear
BD0-1688-TD0
+ TERMINAL CAP
BD0-1708-E00
COIL SPRING
BD0-1813-300
Pin (F)
BD0-1874-300
GUIDE BAR (A) (97A-042-104B)
BD0-1875-300
GUIDE BAR (B) (97A-042-104A)
BD0-1876-300
STOPPER PLATE (97A-042-105)
BD0-1877-300
SCREW (97A-042-103)
BD0-1880-300A
CYLINDER HEAD (A50030A-01)
BD0-1880-300B
CYLINDER HEAD ANGLE (A50031-01)
BD0-1897-E00
RETAINER
BD0-1913-300
plate
BD0-1917-300
SPRING
BD0-1918-300
cam
BD0-1919-300
Guide pin
BD0-1939-300
roller
BD0-1988-300
PIN
BD0-1989-300
SUCTION RUBBER
BD0-1989-800
SUCTION RUBBER 4"
BD0-1993-300
Spacer
BD0-2002-300
Spring holder
BD0-2003-300
MINI SPRING
BD0-2045-300
Lock lever
BD0-2151-T00
NUT
BD0-2153-T00
SPRING TORSION
BD0-2157-T00
NUT
BD0-2158-P00
LEVER
BD0-2214-T00
GEAR
BD0-2227-E00
GUIDE PIN
BD0-2256-300
Hinge (Vibration Isolation Table Type)
BD0-2762-300
VAC nipple φ2.0×M3
BD0-2763-300
Sensor nipple φ3.5 x M4
BD0-2795-300
FRANZE 2"
BD0-2796-300
RING A 2"
BD0-2928-E00
PIPE PLASTIC
BD0-2948-300
Plate
BD0-2993-300
Washer
BD0-3042-800
RUBBER RING
BD0-3195-E00
GEAR
BD0-3196-E00
GEAR
BD0-3336-N00
SCREW
BD0-3375-800
SLIP WASHER
BD0-3377-300
Stopper holder (B)
BD0-3423-300
2" holder plate
BD0-3424-300
2" Plate
BD0-3493-300
GUIDE RAIL
BD0-3525-300
Stopper pin
BD0-3551-300
Bearing shaft
BD0-3714-300
screw
BD0-3818-TD0
IRIS PLATE
BD0-3835-300
Carry-out Tr plate
BD0-3955-300
PLATE
BD0-3959-300
Dummy piece
BD0-4099-300
shaft
BD0-4210-300
PIN (500)
BD0-4227-E00
PISTON
BD0-4446-300
SPRING
BD0-4462-300
SPRING
BD0-4467-300
SPRING
BD0-4470-300
roller
BD0-4504-300
SPRING
BD0-4509-300
Holder
BD0-4513-E00
DOG
BD0-5143-P00
BLOCK 5"
BD0-5157-E00
GEAR
BD0-5158-E00
GEAR (A/H)
BD0-5169-300
Guide Piece
BD0-5198-300
BEARING (6000)
BD0-5200-N00
PULLEY DRIVE
BD0-5202-300
BEARING (6300)
BD0-5214-N00
COILED SPRING
BD0-5221-P00
WIRE
BD0-5228-P00
WIRE
BD0-5290-800
5" sealed rubber outer
BD0-5315-300
Cover plate 5"
BD0-5317-300
block
BD0-5318-300
block
BD0-5319-300
block
BD0-5320-300
Holder (L)
BD0-5321-300
Holder (R)
BD0-5322-300
Cover plate 5”
BD0-5412-E00
GEAR
BD0-5432-300
Shading plate (SUS)
BD0-5529-E00
SPRING
BD0-5602-300
MASK positioning pin
BD0-5602-301
MASK positioning pin (long)
BD0-5611-T00
4" RUBBER FOR CHUCK
BD0-5696-T00
GUIDE PLATE
BD0-5697-T00
SLIT BAR (B)
BD0-5729-P00
RING SCREW
BD0-5761-N00
INSULATOR (A)
BD0-5762-N00
INSULATOR (B)
BD0-5835-300
Sirocco Fan Hose Adapter
BD0-5845-300
PNEUMATIC CUSHION
BD0-5883-300
Plate A
BD0-5884-300
Plate B
BD0-5885-300
Plate C
BD0-5933-301
COLLAR PLATE (A3PA-5325)
BD0-5933-302
Engraving plate (A3PA-5202) transparent
BD0-5933-303
Engraving plate A3PA-5201) White
BD0-5933-304
Color Plate (Divided into two)
BD0-5933-30E
COLLOR PLATE (YELLOW) A3PA-5105
BD0-5933-30G
COLLOR PLATE (GREEN) A3PA-5103
BD0-5933-30R
COLLOR PLATE (RED) A3PA-5102
BD0-5933-30W
COLLOR PLATE (WHITE) A3PA-5101
BD0-6214-300
5" nozzle
BD0-6242-800
Lens barrel
BD0-6243-800
Ring screw
BD0-6244-800
Spacer
BD0-6247-800
Holder
BD0-6248-800
Filter Holder
BD0-6333-E00
CROSS SPRING
BD0-6391-E00
GEAR
BD0-6642-300
plate
BD0-6642-T00
PLATE
BD0-6644-Z00
SOCKET
BD0-6649-300
plate
BD0-6649-Z00
PLATE
BD0-6651-300
plug
BD0-6841-N00
PLATE
BD0-6857-300
handle
BD-0701G
LED 25V Green
BD-0701R
LED 24V Red
BD0-7283-300
BLOCK
BD0-7297-E00
COILED SPRING
BD0-7298-E00
COILED SPRING
BD0-7313-T00
GUIDE PLATE (A)
BD0-7314-T00
GUIDE PLATE (B)
BD0-7632-E00
SHAFT
BD0-7745-300
HOLDER BLOCK
BD0-7746-P00
SHAFT
BD0-7769-300
Switch Cover
BD0-8125-300
Slit bar (A)
BD0-8125-P00
BAR FOR SLIT(A)
BD0-8127-P00
BAR FOR SLIT(B)
BD0-8128-300
Slit bar (C)
BD0-8128-P00
BAR FOR SLIT(C)
BD0-8129-300
Slit bar (D)
BD0-8129-P00
BAR FOR SLIT(D)
BD0-8131-P00
COILED SPRING
BD0-8151-E00
COILED SPRING
BD0-8226-300
MPA500 W/D Pad Holder
BD0-8229-T00
RUBBER SPACER
BD0-8288-Z00
Suction Rubber
BD0-8414-E00
GUIDE BAR
BD0-8420-T00
RUBBER WASHER
BD0-8425-Z00
Hand suction pad
BD0-8426-E00
RUBBER HOLDER
BD0-8426-T00
RUBBER HOLDER
BD0-8429-300
BOLT (SUS)
BD0-8430-P00
SHAFT HAND
BD0-8573-300
BLOCK(OUT)
BD0-8661-E00
CUSHION
BD0-8797-300
LASER POWER SUPPLY HOLDER PLATE
BD0-8837-E00
SPRING STEEL
BD0-9431-300
Juracon Catch
BD0-9434-300
STOPPER PIN (COVER)
BD0-9448-Z00
Suction Rubber
BD0-9451-E00
ARM
BD0-9674-800
5" inside the shield rubber
BD0-9707-300
Leaf spring
BD0-9708-300
PROTECTION PLATE (A)
BD0-9709-300
PROTECTION PLATE (B)
BD0-9709-P00
PROTECTION PLATE
BD0-9833-300
ROLLER
BD0-9959-T00
PIN
BD0-9967-300
Plate (Objective Sensor Kit)
BD0-9968-300
Spacer (Objective Sensor Kit)
BD0-9978-E00
SPRING COILED
BD1-1750-TD0
T-SPRING PLATE
BD1-2079-TD0
HOUSING FOR SENSOR
BD1-2369-N00
HOLDER
BD1-2404-300
FRAME
BD1-2405-300
FRAME
BD1-2406-300
FRAME
BD1-2407-300
FRAME
BD1-2412-300
NYLON CHIP
BD1-2504-N00
SPRING
BD1-2575-300
Career Guide
BD1-2724-300
HOLDER
BD1-2946-300
Rubber roller
BD1-2951-N00
SHAFT
BD1-3032-300
FIXED KNOB THETA
BD1-3043-300
FIXED KNOB XY
BD1-3119-N00
COILED SPRING
BD1-3196-300
Shading plate (SUS)
BD1-3202-300
Shading plate (SUS)
BD1-3207-N00
SPRING
BD1-3219-N00
JOINT PIN
BD1-3221-N00
PLATE
BD1-3233-300
GUIDE CARRIER (small)
BD1-3234-300
GUIDE CARRIER (large)
BD1-3244-300
Gear
BD1-3247-300
Comb teeth
BD1-3261-300
6" BELT
BD1-3272-300
BELT
BD1-3287-300
5" BELT
BD1-3344-N00
SCREW
BD1-3636-300
Plate 6" (for chuck)
BD1-3655-300
SUCTION RUBBER HOLDER(4",5")
BD1-3735-300
Hinge Holder
BD1-3749-300
Wafer guide (5")
BD1-3750-300
Wafer guide (5")
BD1-3778-300
Spring
BD1-3900-N00
PIN
BD1-3912-300
T/T sensor - light shield
BD1-4067-300
Mask loader cover fixing hinge
BD1-4074-300
Hinge
BD1-4092-300
BELT
BD1-4093-300
BELT
BD1-4453-Z00
Shutter plate (Deep)
BD1-5024-300
RUBBER ROLLER
BD1-5025-N00
SHAFT BEARING
BD1-5026-N00
SPACER
BD1-5029-N00
SHAFT BEARING
BD1-5030-N00
SPACER
BD1-5031-N00
SHAFT
BD1-5044-300
4" BELT
BD1-5044-N00
BELT
BD1-5150-300
KNOB FOR SLIT
BD1-5151-300
SCREW
BD1-5164-300
BLADE SET BLOCK
BD1-5167-300
SCREW FOR BLADE
BD1-5168-N00
ADAPTER
BD1-5200-300
absorber
BD1-5537-300
Delrin Gear L
BD1-5538-300
Delrin Gear S
BD1-5552-300
shaft
BD1-5607-300
Elbow (small)
BD1-5608-300
Elbow (large)
BD1-5787-300
bearing
BD1-5787-Z00
6” Metal Roller
BD1-5788-300
bearing
BD1-5980-300
Shutter plate
BD1-6290-300
screw
BD1-7314-300
STOPPER
BD1-7315-300
ARM
BD1-8019-300
HOLDER 6"
BD1-8023-300
HOLDER 6"
BD1-8364-300
Pulse motor gear
BD1-8364-800
Pulse motor gear type 2
BD6-0076-300
block
BD6-0083-N00
BLADE INSIDE 2.0MM
BD6-1414-R00
Middle plate (recycled product)
BF6-0009-800
Rotary Solenoid
BF6-0018-E00
BLOCK
BF6-0019-E00
BLOCK
BF6-0041-Y00
AA MOTOR
BF6-0082-300
FEED SCREW UNIT
BF6-0089-T00
COUPLING
BF6-0094-300
screw
BF6-0151-T00
FILTER HOLDER
BF6-0155-E00
PUSHING ROLLER UNIT
BF6-0156-E00
CLICK UNIT BASE(L)
BF6-0157-E00
CLICK UNIT BASE(R)
BF6-0160-300
MOTOR (XY)
BF6-0171-300
MOTOR (X micro)
BF6-0172-300
MOTOR (XY coarse)
BF6-0200-300
A/S Focus knob
BF6-0205-N00
MIRROR
BF6-0271-E00
SHAFT
BF6-0273-E00
SHAFT
BF6-0284-P00
LIGHT GUIDE
BF6-0289-300
Screw Unit
BF6-0292-P00
LEVER UNIT (A)
BF6-0292-T00
LEVER (A)
BF6-0293-P00
LEVER UNIT (B)
BF6-0293-T00
LEVER (B)
BF6-0316-P00
FILTER
BF6-0526-300
XY stage ring (large)
BF6-0528-300
MOTOR (X)
BF6-0529-300
MOTOR (Y)
BF6-0530-300
MOTOR (θ)
BF6-0532-N00
GEAR
BF6-0533-N00
GEAR
BF6-0534-N00
GEAR
BF6-0735-300
Rotary Actuator
BG0-7057-K00
5" FLY EYE LENS
BG0-7078-400
FLY EYE LENS
BG4-2592-301
Ball Screw (X)
BG4-2593-300
BALL SCREW UNIT (Y)
BG4-2593-301
Ball Screw (Y)
BG6-0086-300
+ WIRE
BG6-0087-300
- WIRE
BG6-0102-302
4" Wafer Chuck (Matte)
BG6-0129-305
MOTHER BOARD
BG6-0185-001
IC(PMM9713PT) for PM DRIVE PCB
BG6-0185-002
Transistor (2SC2655)
BG6-0277-E00
2CH AA PRE-AMP PCB ASSY
BG6-0331-E00
PHOTO SENSOR PCB ASSY
BG6-0333-E00
PCB ASSY DISTRIBUTOR
BG6-0333-T00
PCB ASSY DISTRIBUTOR (500FA)
BG6-0401-T00
PCB M/W STAGE IF
BG6-0405-T00
PCB SCAN DRIVE
BG6-0412-300
ILPCB
BG6-0465-300
PREALIGN PCB
BG6-0470-N00
LAMP UNIT
BG6-0472-E00
MASK SIGNAL
BG6-0476-N00
PCB SCAN DRIVE IF
BG6-0477-E00
PCB SCAN DRIVE
BG6-0481-300
6” Mask Plate
BG6-0491-N00
PHOTO SENSOR UNIT
BG6-0513-J00
PCB FOR PS
BG6-0531-300
I/L cable
BG6-0537-E00
PCB DC POWER SUPPLY
BG6-0578-P00
VACUUM SWITCH
BG6-0583-N00
PCB I/O VACUUM SWITCH
BG6-0586-N00
PCB MPU2
BG6-0628-T00
PCB LASER SCAN
BG6-0645-P00
PRESS SWITCH
BG6-0645-T00
PRESS SWITCH 5.5K
BG6-FFCP-301
Special Calibrator
BG9-0111-P00
PRESS SWITCH
BG9-0111-Y00
PRESSURE SWITCH
BG9-0112-Y00
PRESSURE SWITCH
BG9-0121-300
LI-PCB (old type)
BG9-0178-T00
PRESSURE SENSOR UNIT
BG9-0232-T00
PCB AF2 1F
BG9-0234-T00
PCB AF2 DISTRIBUTOR
BG9-0311-300
WIRE(-)DEEP
BG9-0311-Z00
Wire unit (-) Deep
BG9-0343-N00
PCB PRE-AMP IUC-M3
BG9-0396-E00
SLIT UNIT
BG9-0404-T00
PCB AIR PRESSURE CONTROLL
BG9-0406-T00
PCB ASSY FOR T/T
BG9-0412-N00
PCB ASSY AA-1
BG9-0413-N00
PCB ASSY AA-2
BG9-0414-N00
PCB ASSY AA-3
BG9-0415-N00
PCB ASSY AA-4
BG9-0434-E00
PCB MV/TT 1F
BG9-0434-P00
PCB ASS Y MV/TT
BG9-0435-E00
PCB ASSY MASK STAGE 1F
BG9-0436-E00
PCB WAFER STAGE IF2
BG9-0534-300
LI-PCB
BG9-1168-N00
PCB WAFER STAGE IF1
BG9-1169-N00
PCB ASSY AF3
BG9-1180-N00
M/W DIS PCB
BG9-1184-N00
AF3 PCB ASSY
BG9-1221-N00
AS/IL PCB
BG9-1272-N00
WAFER DISC 4"
BG9-1419-300
AS PREAMP PCB
BG9-1621-300
PHOTO UNIT
BG9-1692-Z00
wire unit（－）
BH0-0057-300
TRANSISTOR　（2ＳＣ1881Ｋ）
BH0-0065-300
TRANSISTOR　（2ＳＣ1061C）
BH0-1100-TD0
PHOTO DIODE (S1226-5BQ)
BH0-2067-300
IC 4558DD
BH0-2089-E00
IC
BH0-2105-300
IC (LM311)
BH0-2106-E00
IC
BH0-2107-E00
IC
BH0-2108-E00
IC
BH0-2114-300
IC 6821P
BH0-2115-300
IC NB424 (8T26)
BH0-2115-301
IC (8T26)
BH0-2118-300
IC 74367 (replacement for 8T97)
BH0-2119-300
IC 8T98P
BH0-2119-301
IC (8T98)
BH0-2122-300
IC μpA53C
BH0-2122-301
IC (μPA53C)
BH0-2138-300
IC (74LS273N)
BH0-2140-300
IC (74LS139N)
BH0-2155-300
IC (4151D)
BH0-2317-300
OP amp (HA17902P)
BH0-2393-E00
IC
BH0-2411-300
IC(74LS377N)
BH0-2432-300
RAM
BH0-2630-N00
IC
BH0-2895-300
IC MB486 (8T96 compatible)
BH0-4019-300
Phototransistor
BH0-4021-300
Phototransistor
BH0-4023-E00
PHOTO DIODE
BH0-4064-E00
PHOTO SWITCH
BH0-4155-300
PHOTO DETECTOR
BH0-4375-300
PHOTO SENSOR
BH0-7007-N00
SURCE ABSORBER
BH1-0128-E00
PC ARRY FIXED RESISTOR
BH1-0139-300
Resistor array (4.7KΩ)
BH1-0175-300
Resistor array (2.2KΩ)
BH1-0255-E00
METAL CLAD WIRE WOUND
BH1-2024-T00
VARIABLE RESISTOR
BH1-2042-P00
VARIABLE RESISTOR
BH2-0062-300
MOTOR
BH2-0087-Y00
AC MOTOR
BH2-0090-300
MOTOR
BH2-0202-300
motor
BH2-0214-300
Carry-out truck motor
BH2-0245-300
Sirocco fan
BH2-0256-N00
MOTOR
BH2-0310-300
Pulse motor (Type 2 for 600)
BH2-0375-300
Pulse motor (Type 2 for 500)
BH2-0514-300
MOTOR
BH2-1042-300
MAGNETIC VALVE (AIR)
BH2-1043-301
MAGNETIC VALVE (VAC)
BH2-2043-300
RELAY
BH2-2094-E00
RELAY
BH2-2096-N00
RELAY
BH2-2159-300
COUNTOR (H7EC-NV)
BH2-5009-301
HOUR METER
BH2-5018-300
HOUR METER
BH2-9019-P00
GEAR HEAD
BH3-0072-300
SWITCH (31-122)
BH3-0073-300
SWITCH (EAO 31-282)
BH3-0074-300
SWITCH (31-152)
BH3-0075-300
SWITCH (fine/coarse movement) MLW3022
BH3-0076-300
Switch MLW-3028
BH3-0078-300
Counter (ALING)
BH3-0079-300
Counter (PRINT)
BH3-0084-300
Rotary switch
BH3-0085-300
switch
BH3-0085-301
switch
BH3-0187-300
Toggle Switch
BH3-0219-E00
SWITCH
BH3-0230-300
Paddle Switch
BH3-0231-300
Paddle Switch
BH3-0239-300
SWITCH (A3PA-90C12-24)
BH3-0239-E00
PUSH SWITCH
BH3-0240-300
switch
BH3-0241-E00
SEE SAW SWITCH
BH3-0249-E00
PUSH SWITCH
BH3-0276-300
Micro Switch
BH3-0304-300
SWITCH
BH3-0311-T00
SWITCH
BH3-0353-T00
SWITCH
BH3-0354-E00
MICRO SWITCH
BH3-0377-E00
MICRO SWITCH
BH3-0402-P00
SWITCH
BH3-0438-300
switch
BH3-0786-300
Switch lamp (LED white split)
BH3-0787-300
switch
BH3-1230-T00
SWITCH
BH3-2014-T00
FUSE (1A)
BH3-3036-300
TUNGSTEN LAMP
BH3-3049-300
MERCURY LAMP
BH3-3061-300
LAMP (START) MG-28V
BH3-3061-300L
LED Lamp
BH3-3071-300
LAMP (DEEP UV)
BH3-3079-300
LAMP (ALIGN) T4.5 28V
BH3-3164-300
500W UV lamp
BH3-4207-300
connector
BH3-4208-300
connector
BH3-4249-300
PLUG(2S)
BH3-4286-300
connector
BH3-4288-300
connector
BH3-4318-300
CONNECTOR
BH3-4319-300
RECEPTACLE
BH3-4550-300
connector
BH3-4551-N00
RECEPTACLE
BH3-4554-300
connector
BH3-4566-300
connector
BH3-4581-300
connector
BH3-4622-300
Connector (CTC)
BH3-4644-N00
COUNTER
BH3-4834-301
Connector
BH3-4868-300
Connector (TDC)
BH3-5025-300
IC (6802P)
BH3-5076-T00
SOCKET
BH3-8028-E00
TEMPERATURE SWITCH
BH3-9040-300B
SWITCH COVER (Rectangular)
BH3-9041-300
SWITCH CAP (BLUE)
BH3-9041-300B
SWITCH COVER (square)
BH3-9059-300
SWITCH COVER (EAO 31-925)
BH3-9059-400
SWITCH COVER (EA0 01-925)
BH4-2152-300
Car code
BH5-1012-N00
NOISE FILTER
BH5-3038-300
Power supply 12V4.5A
BH5-3038-E00
SWITCHING REGULATOR
BH5-3039-300
Power supply 5V20A
BH5-3040-300
Power supply 12V8A
BH5-3041-300
Power supply 24V6A
BH5-3132-N00
STEPPING MOTOR DRIIVE PCB
BH5-6016-300
CTC Sensor
BN9-4025-800
mirror
BN9-4439-R00
MIRROR (G2.G5) Re-coated
BN9-4442-P00
MIRROR
BN9-4443-P00
MIRROR
BN9-4445-P00
MIRROR
BN9-4584-C00
lens
BN9-4585-C00
lens
BN9-4644-P00
MIRROR
BN9-4706-R00
Parabola Mirror - DEEP-UV Recoat
BN9-4708-Z00
Mirror (CM250 back reflection)
BN9-4728-A00
MIRROR (recoat)
BN9-4730-A00
MIRROR (recoat)
BN9-4730-C00
Parabolic Mirror
BN9-4788-T00
FILTER (B390)
BN9-5015-R00
MIRROR (Ellipse) Re-coat
BN9-5027-N00
MIRROR
BN9-5028-N00
GLASS PLATE
BN9-5030-300
Cylindrical lens (5")
BN9-5031-300
Cylindrical lens 4"
BN9-5043-300
Cylindrical lens 6"
BN9-5269-300
Collimator lens (for PLA600)
BN9-5274-300
Condenser Lens
BN9-8032-Z00
First mirror (for 600 (Deep 250)
BS1-1523-P00
COILED SPRING
BS1-1552-E00
COILED SPRING
BS1-2023-E00
RUBBER RING
BS1-2024-300
O-RING
BS1-2025-E00
RUBBER RING
BS1-2031-300
O-RING
BS1-2044-300
O-RING
BS2-0007-E00
BUSH
BS2-0058-300
BEARING (NSK688)
BS2-0060-N00
BALL BEARING
BS2-0064-300
BEARING (NSK 609)
BS2-0076-300
BEARING (ORIGIN T3-1)
BS2-0077-300
BEARING (NB SM-6G)
BS2-0093-301
BEARING
BS2-0096-300
BEARING (NSK 693)
BS2-0097-300
BEARING (SSLF 940ZZ)
BS2-0098-300
Pyroball
BS2-0117-300
BEARING (ORIGIN SS3-7ZZ)
BS2-0121-300
BEARING
BS2-0129-300
Bearing
BS2-0131-300
BEARING (SSLF-730ZZ)
BS2-0134-300
BEARING (NMB L-730ZZ)
BS2-0167-E00
BEARING
BS2-0211-300
BEARING (ORIGIN T8-16)
BS2-0212-300
BEARING (ORIGIN T12-23)
BS2-0213-300
BEARING (ORIGIN T10-18)
BS2-0224-N00
BALL SLIDER
BS2-0299-300
BEARING
BS2-0299-301
Cam Follower
BS2-0300-300
Bearing
BS2-0320-300
bearing
BS2-0324-300
bearing
BS2-1034-P00
BALL BEARING
BS6-0143-T00
WASHER
BS6-0156-300
VACUUM GAUGE
BS6-0158-T00
JOINT
BS6-0160-300
Bearing (IKO LM81517)
BS6-0162-300
PILLOW BALL (MBT8T)
BS6-0163-300
PILLOW BALL (MBT12T)
BS6-0177-E00
TEE
BS6-0179-T00
ELBOW
BS6-0181-300
Pressure gauge
BS6-0182-300
REGULATOR
BS6-0207-300
Filter Unit
BS6-0818-300
RUBBER BELT4”
BS7-4004-300
CYLINDER (TR)
BS7-4008-300
CYLINDER (A/H) 500
BY9-2001-300
Dial gauge (Peacock 5F)
CHUCK-001
Thermocouple Holder
COV-0002-300
Alignment Scope Cover
COV-0014-300
Elevator top cover
COV-0015-300
Elevator bottom cover
COV-0016-300
Main unit front cover (for 600)
COV-0022-300
Arm Covers
COV-0023-300
Front cover PLATEA
COV-0024-300
Front cover BASE
COV-0026-300
Lighting device stay 1
COV-0027-300
Lighting device stay 2
COV-0028-300
Aluminum Block
COV-0029-300
Mask loader side cover
COV-0030-300
A/S Blank Plate
COV-0032-300
Cover bracket
COV-0033-300
Cover bracket
CTC-0001
Earth leakage breaker
DFU1514W-A2
MOTOR DRIVER
DFR1507
MOTOR DRIVER
DFR1514
MOTOR DRIVER
EE-1001
connector
EE-SX671A
Sensor
FPA-001
bearing
FPA-002
Bearing CFA3A (THK)
FPA-003
bearing
FR4ZZ
bearing
FS-V11P
Amplifier
FU-37
sensor
FU-38
Fiber Unit
FU-35FZ
Fiber Sensor
G46-10-01M
Pressure gauge (for 1MPa)
GAP-001
GAP gauge end terminal
GAP-TOOL-001
Stone surface plate
GAP-TOOL-002
Aluminum Trunk
GAP-TOOL-003
Measurement table
GAP-TOOL-004
sleeve
GAP-TOOL-005
Clamp
HC-0001-IR
IR lamp
HF321783
Battery unit
HR9-12FRT2
battery
IT0-0329-OPT
High brightness LED sensor unit (PA)
IT4-0503-OPT
High brightness LED (AF) board
IT4-0503-OPT
High brightness LED (AF) board type 2
IT6-0108-OPT
High brightness LED (PA) board
ITC-0001-300
7-segment display
ITC-0002-300
7DISPLAY PCB
IUCM-001
cable
L456105
O-RING (CD-SEM)
L456905
O-ring AS568-369
L456908
O-ring As568-372
LP-5M
Fittings
M2.5Tube nipple
M2.5Tube nipple
MC-3102L-NC-4VR2AAA00
Mass Flow Controller
MOL-40C-12-12
Coupling
MPA500-PCB
Board
N1001-XHSB1
Ultrasonic Driver
PAF-0001-modified
SENSOR (E2K-X4MEI)
PAF-0003-modified
Connector-L bracket
PAF-0005-modified
BLOCK
PAF-0007-modified
Pulley (PL001006-K1)
PAF-0008-modified
Support
PC4-M5M
Fitting B-400-1-2RT
PCH2-001
2" Universal Chuck
PISCO fittings
Fittings set
PL000905-K1
Cover pin
PL0105142-01
Move Plate t0.5
PL0105143-01
Move Plate t0.8
PL0105153-01
VAC nipple φ2.0×M2.6
PL0108201-01
Sensor bracket φ4 SP
PL0108202-01
Spacer plate 50 x 15
PL030613-1K
Sensor Block TOP
PL06121902-01
Carrier unit plate
PL0810121-300
PULLY (A)
PL1110141-306
Adjustment screw (M x 45)
PL1203072-01
Guide block plate
PL1203300-01
Press roller assembly
PL4-M5M
Fittings
PL9812101-300
Tube selection
PL990120-1K
CABLE STOP
PL990806-1K
PLA bearing shaft
PL-AF-2-300
SHAFT 2 holes
PL-AF-3-300
SHAFT 3 holes
PL-AF-4-300
SHAFT 4 holes
PL-CL-6
6" Calibrator (BG9-1553)
PLC-CPU
PLC set
PM-TP1-001
Pulse motor TYPE1 mounting plate
PM-TP1-002
Pulse motor TYPE1 mounting plate
PSC-0003-300
SWITCH COVER
PVDF-6-FTF-B
nut
PWC-0006-kai
Port screw
PWC-0007-kai
O-RING
R-01
Resistor array - 10KΩ (4 elements/5pin)
ROM-001
ROM (MBM27C512-20)
ROM-002
ROM (2732A-35)
ROM-003
ROM(27512-15)
SD-3678-E00
SPRING
SD-4106-300
BALL BEARING
SD-4323-P300
SPRING
SD-4323-T00
SPRING
TDC-0001-300
TDC connector holder
TFE174CSE
TFE174CSE
TFE174H
TFE174H
TP-3R21GB-8
Regulator
TPC-0001-300
Pisco joint PC-3/8-01
TPC-0002-300
Pisco joint PC-3/8-02
TPC-0003-300
Pisco joint PC-3/8-03
TPC-0004-300
Pisco joint PC-1/4-01
TPC-0005-300
Pisco joint PC-1/4-02
TPC-0006-300
Pisco joint PH-3/8-02
TPC-0007-300
Fitting B-400-1-2RT
TPC-0008-300
Pisco joint 3/8 PE03/8
TPC-0009-300
Pisco joint PV-3/8
TPC-0010-300
Pisco joint HV 3/8-3/8
TPC-0011-300
Koganei Quick Fitting Straight TS6-01
TPC-0013-300
Hose fitting (PY3/8)
TPC-0014-300
Hose fitting (PY1/4)
TPC-0015-300
Hose joint (PE1/4)
TPC-0017-300
Joint (6mm)
TR-001
φ90 rubber belt
UVD-365-300
UV DETECTOR (365)
UVD-405-300
UV DETECTOR (405)
UVD-S254-300
DETECTOR (245)
UVD-S365-300
Receiver UVD-S365 (for UIT-150 only)
VLD4CS-VFC-STD-316L
KITZ valves
VLD4MS-VC-STD-316L
Low Pressure Valve
VQ1101-5B1
Solenoid valve
VQ1301-5B1
Solenoid valve
VR3308S
LED
VR1-1141-300
Resistor array (3.3kΩ 4 elements 5 pins)
VR5-0300-300
Resistor array: 4.7KΩ
VR5-0380-300
Resistor Array - 10KΩ
VR9-0050-300
TRIMER RJ6P 100KΩ
VR9-0186-300
TRIMER RJ6P 10KΩ
VR9-0272-300
TRIMER RJ6P 100KΩ
VR9-0273-300
TRIMER RJ6P 200KΩ
VT1-001
transformer
W-002-06
Flapper Tool
W-005-06
Teflon Nut
W-009-07
ZT8220B
W-012-07
ZIATECH-S1
W-013-07
WJ996 AUXILLARY BOARD
WA2-0039-E00
TRANSISTOR
WA2-0273-300
TRANSISTOR (2SB857)
WA3-0227-300
MPU(6802)
WA3-0249-300
IC (CD40106B)
WA3-0277-300
IC(SN74LS240)
WA3-0336-300
IC(74LS244N)
WA3-0336-301
IC(SN74LS244)
WA4-0057-300
I C
WA4-0057-301
IC (TD62003P)
WB1-5039-P00
RELAY
WC1-0025-300
switch
WC2-5007-300
SWITCH (A3SA-7050)
WC2-5008-300
SWITCH (A3SJ-8050)
WC9-5003-300
SWITCH (SLL-05EY)
WC9-5004-300
SWITCH (SLL-05EG)
WC9-5005-300
SWITCH (AS3A-5805)
WC9-5006-300
switch
WC9-5006-301
Switch (A3SJ5905)
WG1-9001-300
Halogen lamp
WG8-0068-300
PHOTO SENSOR (GP-1S03)
WG8-0068-301
PHOTO SENSOR (GP-1S03)
WG8-0111-300
PHOTO SENSOR (GP-1S01)
WS3-0053-TD0
PIN
WSSS10-4-5
Washer
WTN-1171A
Inlet
X62-0876-300
MICRO SWITCH (SS-5GL2)
X62-1189-E00
RELAY
X62-1933-T00
RELAY
X62-7440-P00
THERMISTOR
X62-7620-30G
LED LAMP (SSL-24EG)
X62-7620-30R
LED LAMP (SSL-24ER)
X62-7620-30W
LED LAMP (SSL-24EW)
X62-7620-30Y
LED LAMP (SSL-24EY)
X62-7625-300
500W UV lamp
X64-4021-300
TRIMER RJ6P 1KΩ
X65-6143-300
TRANSISTOR (2SA673)
X65-6174-300
TRANSISTOR (2SC1213)
X65-6177-300
TRANSISTOR (2SC1213A)
X65-6320-T00
TRANSISTOR (2SC1162)
X65-7056-300
IC (SN7410N)
X65-7162-300
IC (7430N)
X65-7284-300
IC (7425)
X65-7378-300
Operation pump (old model)
X65-7378-301
Operational Amplifiers
X65-7448-300
IC (7414)
X65-7467-E00
IC MB74LS04
X71-0143-N00
BEARING
X71-0143-T00
BEARING
XD3-1200-T00
PIN
XD3-4200-T00
PIN
XG2-3006-300
bearing
XG2-3010-N401
BALL BEARING
XG3-4007-300
bearing
XG3-4008-300
bearing
XG3-6012-300
bearing
XG3-6019-300
bearing
XG8-1100-T00
STEEL BALL
XM-50101-300
Lighting device set DEEP UV
XS-50104-300
Starter DEEP UV
XZ1-1300-802
Spacer
Y60-0092-300
AF SCREW UNIT
Y60-0119-300
Offset Switch
Y60-0152-30G
BELT (GREEN) Superstar rope
Y60-0152-30R
BELT (Orange)
Y60-0197-300
LENS (KLS-2000-O)
Y60-0211-300
Wire (+)
Y60-0217-300
I/L cable
Y60-0225-300
2"AUTO HAND
Y60-0237-300
GEAR
Y60-0279-300
FILTER (KLS-O)
Y60-0286-300
GRIP UNIT
Y60-0295-300
End Pulley Block
Y60-0435-P00
COUNTER
Y60-0443-P00
TUBE
Y60-0595-PEX
Motor (X)
Y60-4002-300
6inch arm (L)
Y60-4003-300
6inch arm (R)
Y60-4004-300
Arm 5" (left)
Y60-4005-300
Arm 5" (right)
Y60-4040-N00
G6 MIRROR
Y60-4043-N00
CABLE UNIT
Y60-4045-300
IUC-M CABLE
Y60-9097-Z00
Starter cable (+)
Y60-9098-Z00
Starter cable (-)
Y60-9201-E00
FUSE (AC 200V 1.3A)
Y60-9202-300
FUSE (AC 100V 3A)
Y60-9203-E00
FUSE (AV 200V 7.5A)
Y60-9224-P00
PCB Assembly
Y60-9226-N00
RELAY
Y60-9227-P00
RELAY
Y60-9228-N00
RELAY
Y60-9236-P00
PCB Assembly (1SET 3PCS)
Y60-9245-P00
ELECTRO MAGNET
Y60-9253-P00
DIODE
Y60-9256-P00
THYRIIST
Y60-9271-P00
RELAY
Y60-9277-P00
FUSE
Y60-9287-P00
FAN
Y60-9302-300
Detachable hinge
Y75-0101-P00
BREAKER
Y75-0111-T00
TEMPERATURE REGULATOR
Z-002
6" Wafer Fixture

PLA部品一覧

28-5107-300
Noise Filter
63-6131-100
Mini spring
63-6354-100
SLIP WASHER
63-6765-300
Knob (Lighting System XYZ)
BA0-1191-100
Cylinder (T/T) FCS-25-26-SI
BD0-0410-100
Shutter plate
BD0-0711-300
Lock plate
BD0-0748-300
Pin (A/F)
BD0-0753-100
Gear
BD0-0753-300
Gear (A)
BD0-0772-300
GUIDE RAIL
BD0-0773-300
GUIDE RAIL
BD0-0799-300
block
BD0-0828-100
Stage Rock Disc
BD0-0829-100
disk
BD0-0830-100
SPRING
BD0-0830-Z00
SPRING
BD0-0832-305
Stopper
BD0-0845-R00
CLUTCH DISK Medium (Re-polished product)
BD0-0846-R00
CLUTCH DISK(A) Top (Re-polished product)
BD0-0847-R00
CLUTCH DISK(B) lower (re-polished product)
BD0-0879-100
rack
BD0-0884-100
CARIBRATION PIN
BD0-1033-300
Bearing NSK 625UMC3E
BD0-1556-R00
Middle plate (re-polished)
BD0-1559-100
base
BD0-1561-100
disk
BD0-1561-101
disk
BD0-1567-100
RING SPRING
BD0-1568-100
Lock Disk
BD0-1573-100
Pulse motor gear
BD0-1573-100
Pulse motor gear
BD0-1573-300
Pulse motor gear
BD0-1574-100
shaft
BD0-1578-100
Gear
BD0-1582-100
Delrin (L)
BD0-1582-Z00
Delrin (L)
BD0-1583-100
Delrin (S)
BD0-1586-100
COIL SPRING
BD0-1588-300
Vacuum Gear
BD0-1591-100
Guide bar
BD0-1604-100
Sphere
BD0-1604-100
Sphere
BD0-1605-100
Sealed Rubber
BD0-1605-101
Sealed Rubber
BD0-1909-300
shaft
BD0-1913-300
plate
BD0-1917-300
Spring
BD0-1918-300
cam
BD0-1919-300
Guide pin
BD0-1939-300
roller
BD0-1989-100
Adhesive Rubber
BD0-1989-800
Suction rubber (4", 5")
BD0-1993-300
Spacer
BD0-2002-300
Spring holder
BD0-2003-300
Mini Spring
BD0-2045-300
Lock lever
BD0-2256-300
Hineg
BD0-2762-100
VAC nipple φ2.2×M3
BD0-2763-100
Sensor nipple φ3.5 x M4
BD0-2795-300
Flange 2
BD0-2796-300
Ring 2
BD0-2948-300
Plate
BD0-2993-300
Washer
BD0-2993-TD0
Washer
BD0-3042-100
O-ring
BD0-3064-100
PIN
BD0-3200-100
shaft
BD0-3371-100
NIPPLE
BD0-3375-100
Slip washer
BD0-3375-101
Slip washer
BD0-3376-100
Stopper holder (A)
BD0-3377-100
Stopper holder (B)
BD0-3377-300
Stopper holder (B)
BD0-3378-100
Stopper holder (C)
BD0-3423-300
2" holder plate
BD0-3424-300
2" Plate
BD0-3425-100
2" spring plate
BD0-3426-100
RUBBER
BD0-3435-100
Holder Plate
BD0-3437-100
4inch spring plate
BD0-3438-100
Shield Rubber
BD0-3438-100
Shield Rubber
BD0-3493-300
GUIDE RAIL
BD0-3525-300
Stopper pin
BD0-3551-300
Bearing shaft
BD0-3634-100
joint
BD0-3714-300
screw
BD0-3835-300
Carry-out Tr plate
BD0-3955-300
Discharge truck dummy plate
BD0-3959-300
Dummy piece
BD0-4099-100
shaft
BD0-4210-100
Shaved head pin (for 500)
BD0-4446-300
Spring
BD0-4459-100
cam
BD0-4462-100
Spring
BD0-4467-300
Spring
BD0-4470-300
roller
BD0-4496-100
4"SETTING ROLLER
BD0-4504-300
Spring
BD0-4505-100
roller
BD0-4509-300
holder
BD0-5169-300
Guide Piece
BD0-5172-100
Gear
BD0-5194-100
Worm Gear
BD0-5195-100
Wheel Gear
BD0-5198-100
Bearings (6000)
BD0-5200-100
Pulley
BD0-5202-100
Bearing (6300)
BD0-5216-100
belt
BD0-5239-100
Cast angle (LAB support)
BD0-5250-100
Cylinder (SS)
BD0-5290-800
5" sealed rubber outer
BD0-5315-300
Cover plate 5"
BD0-5317-300
block
BD0-5318-300
block
BD0-5319-300
block
BD0-5320-300
Holder (L)
BD0-5321-300
Holder (R)
BD0-5322-300
Cover plate 5"
BD0-5432-100
Shading plate (SUS)
BD0-5595-100
Leaf spring
BD0-5602-100
Mask positioning pin
BD0-5602-301
Mask positioning pin (long)
BD0-5788-100
Bearing DDL-1260ZZ
BD0-5835-300
Sirocco Fan Hose Adapter
BD0-5845-100
Pneumacushion PC-400 SWCC
BD0-5870-100
Regulator CKD 2302-2C
BD0-5883-300
Plate A
BD0-5884-300
Plate B
BD0-5885-300
Plate C
BD0-5891-100
Regulator CKD R2000-8-W-T8 (R3000-WG-PLUG)
BD0-6214-300
5" nozzle
BD0-6247-800
Holder
BD0-6248-300
Filter Holder
BD0-6642-300
plate
BD0-6649-300
plate
BD0-6651-300
plug
BD0-6857-300
Handle
BD0-7283-300
Block (for 500)
BD0-7745-300
Block (for 500)
BD0-7749-300
Screw (500 OUT)
BD0-7769-300
Switch Cover
BD0-8125-300
Slit Bar
BD0-8127-300
Slit Bar
BD0-8128-300
Slit Bar
BD0-8129-300
Slit Bar
BD0-8226-300
Disc pad holder (M500)
BD0-8260-100
RUBBER
BD0-8263-100
Sealed Rubber
BD0-8264-100
Sealed Rubber
BD0-8288-Z00
Suction rubber unit (φ4)
BD0-8425-100
Suction rubber set
BD0-8425-Z00
Hand suction pad
BD0-8429-300
Bolt (stainless steel) for A/H height adjustment
BD0-8551-300
Deep UV lamp adapter
BD0-8573-300
Block (500 OUT)
BD0-9431-100
Duracon Catch
BD0-9434-100
Stopper pin (cover)
BD0-9448-100
Suction rubber unit (4" to 5")
BD0-9448-101
Suction rubber unit (4" to 5")
BD0-9448-800
Suction rubber unit (4" to 5")
BD0-9551-100
Suction Rubber
BD0-9674-800
5" sealed rubber inside
BD0-9707-300
Leaf spring
BD0-9708-300
Leaf spring
BD0-9709-300
Leaf spring
BD0-9833-300
ROLLER
BD0-9967-300
Plate (Objective sensor kit)
BD0-9968-300
Spacer (Objective Sensor Kit)
BD1-2349-100
Clamp
BD1-2352-100
rod
BD1-2404-300
FRAME 5"
BD1-2405-300
FRAME 5"
BD1-2406-300
FRAME
BD1-2407-300
FRAME
BD1-2408-100
PULL
BD1-2412-300
NYLON CHIP
BD1-2575-300
Career Guide
BD1-2724-300
Holder
BD1-2855-100
Nut (SUS)
BD1-2946-100
Rubber roller
BD1-2959-100
roller
BD1-2995-100
Auto hand upper and lower fixing jig (M600)
BD1-3015-300
Shading plate
BD1-3016-300
block
BD1-3032-300
KNOB
BD1-3038-300
P/A lower plate
BD1-3043-300
KNOB
BD1-3118-300
Shading plate (M/S θ)
BD1-3196-100
Shading plate (SUS)
BD1-3202-100
Shading plate (SUS)
BD1-3226-100
Sensor plate
BD1-3228-100
Elevator spacer (A)
BD1-3229-100
Elevator spacer (B)
BD1-3233-300
GUIDE CARRIER (small)
BD1-3234-300
GUIDE CARRIER (large)
BD1-3237-100
Gear
BD1-3244-100
Gear
BD1-3247-300
Comb teeth
BD1-3261-300
Belt for 6"
BD1-3272-100
belt
BD1-3287-300
Belt for 5"
BD1-3292-100
WIRE
BD1-3312-300
Spacer
BD1-3313-300
Spacer
BD1-3314-300
Spacer
BD1-3345-100
bearing
BD1-3371-100
PLA600 Mask plate nipple
BD1-3636-100
Plate 6" (for chuck)
BD1-3640-100
Suction rubber holder 6"
BD1-3641-100
Suction rubber 6"
BD1-3642-100
Disc handle (for M600)
BD1-3655-100
Suction rubber holder 5"4"
BD1-3656-100
Suction rubber 5”4”
BD1-3734-100
Auto Hinge
BD1-3735-300
Hinge Holder
BD1-3749-300
Wafer guide (5”)
BD1-3750-300
Wafer guide (5”)
BD1-3778-300
Spring
BD1-3786-100
cam
BD1-3787-100
Guide block
BD1-3889-100
ARM SHAFT
BD1-3897-100
ARM
BD1-3912-300
T/T sensor - light shield
BD1-3914-100
Shaved head pin (for 600)
BD1-4065-100
Holder Roller
BD1-4067-300
Mask loader cover fixing hinge
BD1-4074-300
Hinge
BD1-4092-100
belt
BD1-4093-100
belt
BD1-4453-Z00
Shutter plate (DEEP)
BD1-4700-100
cam
BD1-5024-300
Rubber roller 4"
BD1-5044-300
Belt for 4"
BD1-5150-300
knob
BD1-5151-300
screw
BD1-5157-100
Slit bar (M600)
BD1-5164-100
Block (for 600)
BD1-5167-100
Slit screw (for 600)
BD1-5200-300
Shock absorber
BD1-5370-300
housing
BD1-5535-100
Suction Rubber
BD1-5537-300
Delrin (L)
BD1-5537-100
Delrin (L)
BD1-5538-300
Delrin (S)
BD1-5538-100
Delrin (S)
BD1-5539-100
Slip washer
BD1-5595-100
(+) Spring
BD1-5597-100
O-ring
BD1-5597-100
O-ring
BD1-5600-100
Holder Plate
BD1-5600-100
Holder Plate
BD1-5600-100
Holder Plate
BD1-5601-100
Holder Plate
BD1-5602-100
Spring Plate
BD1-5603-100
Shield Rubber
BD1-5603-102
Shield Rubber
BD1-5604-100
Shield Rubber
BD1-5606-100
PLA600 Ball gauge for mask plate
BD1-5607-100
PLA600 Elbow for Mask Plate(small)
BD1-5608-100
PLA600 Elbow for Mask Plate(large)
BD1-5609-100
PLA600 Mask plate nipple
BD1-5695-100
RUBBER RING
BD1-5700-100
cam
BD1-5735-100
block
BD1-5744-100
Screw Trapezoidal Thread
BD1-5745-100
Resin receiver
BD1-5787-100
bearing
BD1-5787-300
bearing
BD1-5787-Z00
6" metal roller
BD1-5788-100
bearing
BD1-5790-100
belt
BD1-5794-100
belt
BD1-5840-100
Pencil cylinder SCPD3-00-16-45
BD1-5841-100
belt
BD1-5842-100
belt
BD1-5843-100
belt
BD1-5844-100
belt
BD1-5845-100
belt
BD1-5846-100
belt
BD1-5980-100
Shutter plate
BD1-6016-100
Lamp fixing stand
BD1-6142-100
Positioning frame
BD1-6290-300
screw
BD1-6881-100
block
BD1-7314-300
stopper
BD1-7315-100
arm
BD1-8018-300
HOLDER4"
BD1-8019-300
HOLDER6"
BD1-8022-300
HOLDER4"
BD1-8023-300
HOLDER6"
BD1-8364-100
Pulse motor gear (type II)
BD1-8364-101
Pulse motor gear (type II)
BD1-8364-300
Pulse motor gear (type II)
BD1-8364-800
Pulse motor gear (type II)
BD1-9448-100
Adhesive Rubber
BD1-9547-300
6" Full-surface Calibrator
BD1-9547-301
6" Full-surface Calibrator (Recoat)
BD1-9551-100
Suction rubber (2" to 3")
BD1-9551-100
Suction rubber (2" to 3")
BD6-0076-100
Block (600 IN side)
BD6-0081-100
Slit bar
BD6-1414-R00
Middle plate (regrinded) type 2
BD6-2844-100
Push rod
BD6-4709-100
AS Cover
B.D.7-9707-100
Gear
BD8-0635-100
plate
BF6-0009-100
Rotary Solenoid
BF6-0023-100
motor
BF6-0082-100
Main screw
BF6-0082-100
Main screw
BF6-0094-300
screw
BF6-0110-100
Idler (left)
BF6-0111-100
Idler (right)
BF6-0190-100
LAMP UNIT
BF6-0200-300
A/S Focus knob
BF6-0286-100
Knob Unit R
BF6-0287-100
Knob Unit L
BF6-0289-300
Screw Unit(Y,Z)
BF6-0494-100
Screw Unit(X)
BF6-0526-100
Wafer stage retainer (large)
BF6-0527-100
Wafer stage retainer (small)
BF6-0557-100
Lead screw
BF6-0562-100
JOINT BAR
BF6-0694-100
Suction pad (left)
BF6-0695-100
Suction pad (right)
BF6-0735-100
Rotary Actuator
BF6-0735-100
Rotary Actuator
BF6-6857-100
motor
BF6-6857-101
motor
BF6-6857-100
motor
BF6-6860-100
Motor (W/S M500θ) PF42-48083G1 1/300
BG0-7078-400
FLYS EYES LENS
BG0-7358-100
First fly-eye lens unit
BG4-2592-300
BALL SCREW UNIT (X)
BG4-2593-300
BALL SCREW UNIT (Y)
BG6-FFCP-300
4" Full-surface Calibrator
BG6-0072-100
Solenoid valve DC24V
BG6-0073-300
Cable 1
BG6-0086-300
Wire (+) (Wire-AT03B120 Terminal N2-6)
BG6-0087-300
Wire (-) (Wire-AT03B120 Terminal N2-6)
BG6-0102-300
4" Wafer Chuck
BG6-0102-301
Wafer chuck (black)
BG6-0102-302
Matte Chuck 4"
BG6-0104-300
5" Wafer Chuck
BG6-0105-300
4" Calibrator (standard)
BG6-0105-301
4" calibrator (with Teflon)
BG6-0106-300
5" Calibrator
BG6-0106-301
5" Calibrator
BG6-0125-100
PCB8
BG6-0127-100
PCB10
BG6-0128-100
PCB11
BG6-0129-305
Motherboard (when five boards are made)
BG6-0185-001
IC(PM8713PT)
BG6-0185-002
Transistor (2SC2655)
BG6-0391-100
Laser power supply (new model) DGJ-22
BG6-0412-300
IL PCB
BG6-0465-300
PRE ALIGN PCB
BG6-0480-300
5" mask plate
BG6-0480-R00
Mask plate re-polishing
BG6-0481-300
6" Mask Plate
BG6-0531-300
I/L Cable
BG6-0578-E00
Pressure Sensor
BG6-0578-Y00
Vacuum Switch
BG6-FFCP-300
4" Full-surface Calibrator
BG6-FFCP-301
Special Calibrator
BG9-0111-Y00
Pressure Switch
BG9-0112-Y00
Pressure Switch
BG9-0120-100
Motherboard
BG9-0121-300
LI-PCB (old type)
BG9-0305-300
Wafer disk 4”
BG9-0306-300
Wafer disk 5”
BG9-0311-300
Wire unit (-) Deep
BG9-0311-Z00
Wire unit (-) Deep
BG9-0534-100
LI-PCB
BG9-1138-300
Mask holder φ5
BG9-1419-100
AS PREAMP PCB
BG9-1495-100
Motherboard (for PLA600)
BG9-1508-100
PCB8
BG9-1510-100
PCB10
BG9-1512-100
PCB12
BG9-1634-100
Vacuum Gauge
BG9-1635-100
Vacuum Gauge
BG9-1641-100
switch
BG9-1659-100
MB7122E
BG9-1767-300
6" Mask Plate
BG9-9010-100
Damper (for SUPER)
BG9-9371-300
PCB 6M
BG9-9372-100
PCB14
BH0-0057-300
Transistor (2SC1881K)
BH0-0065-300
Transistor (2SC1061C)
BH0-1082-100
HDSP-2000 Display IC
BH0-1153-100
Photodiode
BH0-2067-100
IC 4558DD
BH0-2067-300
IC 4588DD
BH0-2105-300
IC (LM311)
BH0-2114-300
IC 6821P
BH0-2115-300
IC MB424 (equivalent to 8T26)
BH0-2115-301
IC(8T26)
BH0-2118-300
IC 74367 (replacement for 8T97)
BH0-2119-300
IC 8T98P
BH0-2119-301
IC (8T98)
BH0-2122-100
IC (μPA53C)
BH0-2122-301
IC (μPA53C)
BH0-2138-100
IC 74LS273
BH0-2138-300
IC 74LS273
BH0-2140-300
IC 74LS139
BH0-2155-100
IC 4151D
BH0-2155-300
IC 4151D
BH0-2193-300
IC(74251)
BH0-2317-300
Operational amplifier (HA17902P)
BH0-2411-300
IC(74LS377)
BH0-2432-300
RAM
BH0-2432-301
RAM
BH0-2895-300
IC MB486 (8T96 compatible)
BH0-4019-300
Phototransistor
BH0-4021-300
Phototransistor
BH0-4155-300
PHOTO DETECTOR
BH0-4375-100
Photo sensor
BH1-0139-300
Resistor array (4.7KΩ)
BH1-1099-100
volume
BH2-0062-100
Motor RB-35GM-N471-12 1/30
BH2-0068-100
Polygon motor 18A107
BH2-0087-100
AC Motor
BH2-0090-100
Motor RB-35GM-N471-12 1/100
BH2-0092-100
motor
BH2-0101-100
Fan 109S091
BH2-0175-300
Resistor array (2.2KΩ)
BH2-0144-100
Stepping motor (for IUC-M)
BH2-0202-100
Motor RB-35CGM-N445LJ-12-D 1/6
BH2-0214-100
motor
BH2-0245-100
Sirocco fan
BH2-0310-100
Pulse motor (Type 2 for 600) PF42-48B3 (280Ω)
BH2-0310-100
Pulse motor (Type 2 for 600) PF42-48B3 (280Ω)
BH2-0340-100
AC Fan Motor
BH2-0341-100
AC Fan Motor
BH2-0375-300
Pulse motor (Type 2 for 500) PF42-48D3 (12Ω)
BH2-0383-300
Diffuser DC motor 5v
BH2-0514-300
motor
BH2-0828-100
DC Motor
BH2-1042-100
Solenoid valve (AIR)
BH2-1043-100
Solenoid valve (VAC)
BH2-1044-100
Solenoid valve
BH2-2043-100
Relay DC24V
BH2-2126-300
Electromagnetic counter (DC24V)
BH2-2159-100
Counter H7EC-NV/Y92F-35
BH2-5018-300
Hour meter Omron KTH AC100/110
BH3-0072-300
Push SW (EAO 31-122)
BH3-0073-300
Push SW (EAO 31-282)
BH3-0074-300
Push SW (EAO 31-152)
BH3-0077-100
Thumbwheel Switch
BH3-0078-100
Counter (ALIGN)
BH3-0079-100
Counter (PRINT)
BH3-0084-100
Rotary Switch
BH3-0084-300
Rotary switch
BH3-0085-300
switch
BH3-0085-301
switch
BH3-0187-300
Toggle Switch
BH3-0229-100
Push Switch
BH3-0229-101
Push Switch
BH3-0230-100
Battle Switch
BH3-0230-300
Battle Switch
BH3-0231-100
Battle Switch
BH3-0231-300
Battle Switch
BH3-0239-100
Switch (A3PA-90C12-24EW)
BH3-0240-100
Switch (A3PA-90D12-24EW)
BH3-0276-300
Micro switch (SS-5GL)
BH3-0438-300
switch
BH3-0786-100
Switch lamp (white LED)
BH3-0787-LBS
Switch lamp (blue LED)
BH3-0787-LRS
Switch lamp (red LED)
BH3-3036-300
Wheat bulb
BH3-3042-100
Laser head 05LHP121 2mw
BH3-3049-101
Electric Mercury Lamp
BH3-3061-300
Lamp (START) EAO (31-963.2)
BH3-3071-100
Mercury lamp (Deep-UV)
BH3-3078-100
Filament lamp 18W
BH3-3078-101
Filament lamp 18W
BH3-3079-300
Lamp (ALIGN)
BH3-3098-100
Laser head 05LHP151 5mw
BH3-3106-110
Mercury lamp for MPA
BH3-3164-300
500W UV lamp USH-500D
BH3-3179-300
lamp
BH3-3180-100
Halogen lamp OSRAM 64618 (13.8V/85W)
BH3-3182-100
TUNGSTEN FILAMENT LAMP LNS-22X
BH3-4207-100
connector
BH3-4208-300
connector
BH3-4223-300
Hirose PC1620
BH3-4249-300
PLUG (2S)
BH3-4286-300
connector
BH3-4288-300
connector
BH3-4318-300
CONNECTOR (male) UM-SP-1.5 (Hirose)
BH3-4319-300
RECEPTACLE (female) UM-SR (Hirose)
BH3-4550-300
connector
BH3-4554-300
connector
BH3-4566-100
connector
BH3-4581-300
connector
BH3-4622-300
Connector (CTC) shape change
BH3-4834-301
CONNECTOR (male)
BH3-4867-300
RECEPTACLE (female)
BH3-4868-300
Connector (TDC) DDK 57-50140
BH3-5025-300
IC 6820P
BH3-9040-300B
Switch cover (rectangular) EAO Screen 31-903.7
BH3-9041-300B
Switch cover (square) EAO screen 31-953.7
BH3-9042-100
Lever (for MLW-3028) AT-426-W
BH3-9349-100
Bezel
BH3-9382-100
lever
BH4-2152-300
Curly cord
BH5-3030-300
Switching regulator 5V20A (COSEL K100A)
BH5-3110-100
Power supply 15V
BH5-3111-100
Power supply 12V
BH5-3160-100
Power supply (for expansion box)
BH5-3163-100
Power supply (for expansion box)
BH5-3251-100
Servo Module
BH5-3273-100
Power supply (for TV-CPBOX) *Recycled product
BH5-3792-100
Power supply (for expansion box)
BH5-6011-100
Heat sensor (MPA chuck part)
BH5-6015-300
CTC sensor
BH7-0213-100
Receptacle
BN9-4025-100
Mirror (front)
BN9-4026-100
Filters
BN9-4027-100
Filters
BN9-4147-100
Collimator Lens
BN9-4150-100
Filters
BN9-4439-R00
G2, G5 mirror (recoated)
BN9-4706-R00
Parabolic mirror (Deep UV/500WUV compatible) φ55
BN9-4709-100
Mirror
BN9-4728-R00
Parabolic mirror (recoated) φ50 (4" Deep for Lighting 501 only)
BN9-4730-P00
Parabolic mirror (recoat)
BN9-4730-R02
Parabolic mirror (recoat)
BN9-4730-10R
Parabolic mirror (recoated) φ40
BN9-4730-100
Parabolic Mirror Φ40
BN9-5015-100
Ellipso mirror (new)
BN9-5015-R00
Ellipso mirror (recoat)
BN9-5015-R01
Ellipso mirror (recoat)
BN9-5017-100
Cylindrical Lens
BN9-5022-100
G3 Mirror
BN9-5030-100
CYLINDRICAL LENS 5"
BN9-5031-300
CYLINDRICAL LENS 4"
BN9-5032-100
Condenser lens 1
BN9-5033-100
Condenser Lens 2
BN9-5043-100
CYLINDRICAL LENS 6"
BN9-5203-100
Second condenser lens L7
BN9-5204-100
Second condenser lens L8
BN9-5205-100
Third condenser lens L9
BN9-5206-100
G4 Mirror
BN9-5207-100
G5 Mirror
BN9-5268-100
1st mirror (for PLA600)
BN9-5269-100
Collimator (for PLA600)
BN9-5269-100
Collimator (for PLA600)
BN9-5273-100
mirror
BN9-5274-300
Condenser lens (for PLA600)
BN9-5407-100
Wind shield (M600For
BN9-8079-100
G2 mirror (for both SUPER and FA)
BS1-20twenty two-100
O-ring
BS1-2023-100
O-ring
BS1-2024-300
O-ring
BS1-2031-300
O-ring
BS1-2031-301
O-ring
BS1-2044-300
O-ring 1AS-5 Nitori Rubber
BS2-0058-100
Bearings
BS2-0058-300
Bearing
BS2-0064-100
Bearing 609
BS2-0076-100
Bearing T3-10 (ORIGIN)
BS2-0076-300
Bearing T3-10 (ORIGIN)
BS2-0077-100
Bearing SM-6G(NB)
BS2-0077-300
Bearing SM-6G(NB)
BS2-0093-300
Bearing DDLF940ZZ
BS2-0093-100
bearingF684ZZ
BS2-0094-100
Bearing 626ZZ
BS2-0094-102
Bearing 626ZZ
BS2-0095-100
Bearing DDRF1140ZZ
BS2-0095-100
Bearing DDRF1140ZZ
BS2-0096-100
Bearing 693
BS2-0096-300
Bearing 693 MC3AF25 Open grooveless
BS2-0097-300
Bearing SSLF940ZZ
BS2-0098-100
Pyroball (SBT-6)
BS2-0100-100
Bearing IKO LM101929N
BS2-0117-100
bearingF-W683ZZ1
BS2-0117-300
Bearing SS3-7ZZ (ORIGIN)
BS2-0121-300
Bearing 683MC
BS2-0129-100
Bearing MR52
BS2-0131-100
Bearing SSLF-730ZZ
BS2-0131-101
Bearing SSLF-730ZZ
BS2-0133-101
Bearing MF52
BS2-0133-100
Bearing MF52
BS2-0134-100
Bearing L-730ZZ
BS2-0134-300
Bearing L-730ZZ
BS2-0136-100
Bearing DDLF-630ZZ
BS2-0204-100
bearing
BS2-0211-101
Bearing T8-16 (ORIGIN)
BS2-0211-100
Bearing T8-16 (ORIGIN)
BS2-0212-100
Bearing T12-23 (ORIGIN)
BS2-0212-300
Bearing T12-23 (ORIGIN)
BS2-0213-100
Bearing T10-18 (ORIGIN)
BS2-0299-300
Bearing ( SSR-1240ZZ)
BS2-0299-100
Cam Floor
BS2-0300-300
Bearing ( MR126ZZ)
BS2-0301-100
Bearing ( DDL-1040ZZ)
BS2-0320-300
bearing
BS2-0324-300
bearing
BS2-1033-100
bearing
BS6-0164-100
bearing
BS6-0101-100
Bellows DM3-25-25 *Purchase 6 pieces in a lot
BS6-0141-100
V-ring
BS6-0156-300
Vacuum gauge (SMC GZ 46-K-01)
BS6-0160-100
Bearing LM81517
BS6-0162-100
Pillow ball MBT8T Made to order
BS6-0163-300
Pillow ball MBT12T Made to order
BS6-0169-100
Bellows DM3-16-16 *Purchase 6 pieces per lot
BS6-0182-300
Regulator AR110-01 (round resin handle)
BS6-0184-100
Cylinder (A/H) FCS-16-16-SI
BS6-0185-100
Nylon ball
BS6-0207-100
Filter Unit(M4000-8-WF-1)
BS6-0290-100
Speecon (GRO-M5-B) FESTO without check valve
BS6-0290-101
Speecon (GRO-M5-B) FESTO without check valve
BS6-0309-100
Speed controller (GR-M5-B) FESTO with check valve
BS6-0309-101
Speed controller (GR-M5-B) FESTO with check valve
BS6-0336-100
Micrometer Head
BS6-0363-100
AS Air Cylinder
BS6-0637-100
Speed Controller (W type) FESTO GR-M5×2-B
BS6-0658-100
Switch Guard (A3PA-5050) OMRON
BS6-0662-100
TAC valve 3V
BS6-0665-100
Cylinder (TT) lock PBSA16*15‐1309W
BS6-0665-110
Cylinder (TT) lock
BS6-0665-111
Cylinder (TT) lock
BS6-0667-100
Shock absorber
BS6-0779-100
Cylinder (formerly BS7-4126)
BS6-0779-100
Cylinder (formerly BS7-4126)
BS6-0787-100
Insulator
BS6-0818-300
Rubber belt 4"
BS7-1060-100
Clean Gas Filter
BS7-4003-100
Cylinder (PA) PBSA6*15
BS7-4003-101
cylinder
BS7-4004-100
Cylinder (Tr) PBSA10*30
BS7-4004-101
cylinder
BS7-4005-100
Cylinder (AH) PBDA16*30
BS7-4005-101
cylinder
BS7-4007-100
Cylinder (M600A/H) PBDA16*85-1310W
BS7-4008-300
Cylinder (M500AH) PBSA6*30-1228W
BS7-4009-100
Cylinder (M600AH) PBSA6*20-1228W
BS7-4009-101
Cylinder (M600AH) PBSA6*20
BS7-4126-100
cylinder(Old: BS6-0779) PBDA10×35-A (P600 push)
BY9-0502-100
Arkansas Oilstone CKK Size 100 x 25 x 13
BY9-0502-101
Arkansas Oilstone Cherry (Superior) 100 x 25 x 12
BY9-3201-100
White grease 72090
BY9-3206-100
Rozoid Grease 1150E-35019
BY9-8025-100
Gap adjustment rod
BY9-8241-300
Weighing gauge (18.5mm)
SD-3042-100
Pin (for holding wafer disk)
SD-4106-100
bearing
VR1-1141-300
Resistor array (3.3kΩ 4 elements 5 pins)
VR5-0300-300
Resistor array (4.7Ω)
VR5-0380-300
Resistor array (10KΩ)
VR9-0050-300
Variable resistor (10KΩ)
VR9-0186-300
Variable resistor (100KΩ)
VR9-0272-300
Variable resistor (100 Ω)
VR9-0273-300
Variable resistor (200 Ω)
WA2-0273-300
Transistor (2SB857) Compatible with 2SB856-C
WA3-0148-100
Logic Gates
WA3-0227-300
MPU(6802)
WA3-0249-300
IC(CD40106B)
WA3-0277-300
IC(SN74LS240)
WA3-0336-301
IC(74LS244)
WA4-0057-100
IC(TP62003P)
WC1-0025-300
switch
WC2-5007-300
Switch (A3SA-7050)
WC2-5008-300
Switch (A3SJ-8050)
WC9-0025-100
switch
WC9-5003-300
Switch lamp SLL-05EY
WC9-5004-300
Switch lamp SLL-05EG
WC9-5005-300
Switch (A3SA-5805)
WC9-5006-300
Switch (A3SJ-5919) Red/Green
WC9-5006-301
Switch (A3SJ-5905) Yellow-green
WC9-5008-100
Bezel
WG1-9001-100
Halogen lamp
WG8-0068-301
Photosensor (1S03)
WG8-0111-301
Photo sensor (GP1S01)
WN1-0097-100
Power supply (for expansion box)
X62-0876-100
Micro switch SS-5GL2
X62-0879-100
Micro switch SS-5GL
X62-7625-300
500W UV lamp
X64-4021-300
Variable resistor (1KΩ)
X65-6143-300
Transistor (2SC1213)
X65-6174-300
Transistor (2SA673)
X65-6177-300
Transistor (2SC1213A)
X65-7056-300
IC SN7410N
X65-7162-300
IC 7430N
X65-7284-300
IC 7425
X65-7356-100
IC 74279
X65-7356-100
IC 74279
X65-7378-300
Op-amp (old type)
X65-7448-100
IC 7414
X65-7448-300
IC 7414
X71-0257-101
Bearing ( R-1650ZZ)
X71-0258-100
bearing
XG2-3006-253
bearing(L-630ZZ)
XG3-4007-100
Bearing ( DDLF-740ZZ)
XG3-4008-103
bearing
XG3-4010-100
Bearing ( MF104ZZ)
XG3-6012-100
Bearing ( MF126ZZMC3)
XG3-6019-300
Bearing ( RF-1960ZZ)
XG8-1100-032
SUS440C steel ball
XZ1-1300-802
Spacer
Y60-0092-300
AF SCREW UNIT (PLA)
Y60-0119-300
Offset Switch
Y60-0152-10R
Belt Orange (Band - Chemical Band Cord - Cross Section 2mm Mixture #480 (1m Price)
Y60-0182-300
AF SCREEN UNIT (MPA)
Y60-0197-300
Lens (KLS-2000-0)
Y60-0211-100
Wire (+)
Y60-0212-100
Wire (-)
Y60-0217-300
I/L Cable
Y60-0225-300
Autohand 2” (PLA)
Y60-0237-100
Idol Gear
Y60-0237-102
Idol Gear
Y60-0237-110
Idol Gear
Y60-0237-300
Idol Gear
Y60-0279-300
Filter (KLS-0)
Y60-0286-300
Grip Unit
Y60-0290-800
SWING MIRRORUNIT
Y60-0295-300
End Pulley Block
Y60-4002-100
Arm (L) 6" Note: Arm joint (MP0911003A-2) included
Y60-4003-100
Arm (R) 6" Note: Arm joint (MP0911003A-2) included
Y60-4004-300
Arm (L) 5”
Y60-4005-300
Arm (R) 5"
Y60-4009-300
PA board 5"
Y60-4027-100
Solenoid (new model)
Y60-4045-100
IUC-M cable
Y60-4172-300
DC motor (IR)
Y60-9097-300
New starter cable (+)
Y60-9097-Z00
Starter cable (+)
Y60-9098-300
New starter cable (-)
Y60-9098-Z00
Starter cable (-)
Y60-9202-300
fuse
Y60-9294-100
Lighting device fan
Y60-9299-300
Lighting device acrylic cover
Y60-9302-300
Detachable hinge
01 MPAサービス
02 IRAS及びMPA改造
03 PLAサービス
04 SEMサービス
05 WJサービス
SERVICE 商品・サービス
06 NSRサービス
07 移設サービス
08 ICP
09 クラッシャー
10 その他

SERVICE商品・サービス

01 MPAサービス
02 IRAS及びMPA改造
03 PLAサービス
04 SEMサービス
05 WJサービス
06 NSRサービス
07 移設サービス
08 ICP
09 クラッシャー
10 その他
TOP